3/30/2011	11:21:11 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/30/2011	11:21:11 AM	Recipe started at 11:21 AM
3/30/2011	11:21:11 AM	H2 valve closed
3/30/2011	11:21:11 AM	BCl3 valve closed
3/30/2011	11:21:11 AM	PH3 valve closed
3/30/2011	11:21:11 AM	SiCl4 pre valve closed
3/30/2011	11:21:11 AM	SiCl4 post valve closed
3/30/2011	11:21:11 AM	Main Vac valve closed
3/30/2011	11:21:11 AM	Bypass valve closed
3/30/2011	11:21:11 AM	Bubbler valve closed
3/30/2011	11:21:11 AM	Helium valve opened
3/30/2011	11:21:11 AM	Helium MFC set to  500.000000
3/30/2011	11:21:11 AM	H2 MFC set to  0.000000
3/30/2011	11:21:11 AM	BCl3 MFC set to  0.000000
3/30/2011	11:21:11 AM	PHl3 MFC set to  0.000000
3/30/2011	11:21:11 AM	SiCl4 MFC set to  0.000000
3/30/2011	11:21:11 AM	Bypass solenoid MFC set to  0.000000
3/30/2011	11:21:12 AM	Tube furnace set to 0
3/30/2011	11:22:31 AM	Helium valve closed
3/30/2011	11:22:31 AM	H2 valve closed
3/30/2011	11:22:31 AM	BCl3 valve closed
3/30/2011	11:22:31 AM	PH3 valve closed
3/30/2011	11:22:31 AM	SiCl4 pre valve closed
3/30/2011	11:22:31 AM	SiCl4 post valve closed
3/30/2011	11:22:31 AM	Main Vac valve closed
3/30/2011	11:22:31 AM	Bypass valve closed
3/30/2011	11:22:31 AM	Bubbler valve closed
3/30/2011	11:22:31 AM	Helium MFC set to  0.000000
3/30/2011	11:22:31 AM	H2 MFC set to  0.000000
3/30/2011	11:22:31 AM	BCl3 MFC set to  0.000000
3/30/2011	11:22:31 AM	PHl3 MFC set to  0.000000
3/30/2011	11:22:31 AM	SiCl4 MFC set to  0.000000
3/30/2011	11:22:31 AM	Bypass solenoid MFC set to  0.000000
3/30/2011	11:22:31 AM	Tube furnace set to 0
3/30/2011	11:22:32 AM	Run finished at 11:22 AM
3/30/2011	11:22:32 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/30/2011	11:26:26 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/30/2011	11:26:27 AM	Recipe started at 11:26 AM
3/30/2011	11:26:27 AM	Helium valve closed
3/30/2011	11:26:27 AM	H2 valve closed
3/30/2011	11:26:27 AM	BCl3 valve closed
3/30/2011	11:26:27 AM	PH3 valve closed
3/30/2011	11:26:27 AM	SiCl4 pre valve closed
3/30/2011	11:26:27 AM	SiCl4 post valve closed
3/30/2011	11:26:27 AM	Main Vac valve closed
3/30/2011	11:26:27 AM	Bubbler valve closed
3/30/2011	11:26:27 AM	Bypass valve opened
3/30/2011	11:26:27 AM	Helium MFC set to  0.000000
3/30/2011	11:26:27 AM	H2 MFC set to  0.000000
3/30/2011	11:26:27 AM	BCl3 MFC set to  0.000000
3/30/2011	11:26:27 AM	PHl3 MFC set to  0.000000
3/30/2011	11:26:27 AM	SiCl4 MFC set to  0.000000
3/30/2011	11:26:27 AM	Bypass solenoid MFC set to  0.000000
3/30/2011	11:26:27 AM	Tube furnace set to 0
3/30/2011	11:26:58 AM	Helium valve closed
3/30/2011	11:26:58 AM	H2 valve closed
3/30/2011	11:26:58 AM	BCl3 valve closed
3/30/2011	11:26:58 AM	PH3 valve closed
3/30/2011	11:26:58 AM	SiCl4 pre valve closed
3/30/2011	11:26:58 AM	SiCl4 post valve closed
3/30/2011	11:26:58 AM	Bubbler valve closed
3/30/2011	11:26:58 AM	Main Vac valve opened
3/30/2011	11:26:58 AM	Bypass valve opened
3/30/2011	11:26:58 AM	Helium MFC set to  0.000000
3/30/2011	11:26:58 AM	H2 MFC set to  0.000000
3/30/2011	11:26:58 AM	BCl3 MFC set to  0.000000
3/30/2011	11:26:58 AM	PHl3 MFC set to  0.000000
3/30/2011	11:26:58 AM	SiCl4 MFC set to  0.000000
3/30/2011	11:26:58 AM	Bypass solenoid MFC set to  0.000000
3/30/2011	11:26:59 AM	Tube furnace set to 0
3/30/2011	11:26:59 AM	Run finished at 11:26 AM
3/30/2011	11:26:59 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/30/2011	11:30:32 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/30/2011	11:30:33 AM	Recipe started at 11:30 AM
3/30/2011	11:30:33 AM	H2 valve closed
3/30/2011	11:30:33 AM	BCl3 valve closed
3/30/2011	11:30:33 AM	PH3 valve closed
3/30/2011	11:30:33 AM	SiCl4 pre valve closed
3/30/2011	11:30:33 AM	SiCl4 post valve closed
3/30/2011	11:30:33 AM	Main Vac valve closed
3/30/2011	11:30:33 AM	Bypass valve closed
3/30/2011	11:30:33 AM	Bubbler valve closed
3/30/2011	11:30:33 AM	Helium valve opened
3/30/2011	11:30:33 AM	Helium MFC set to  500.000000
3/30/2011	11:30:33 AM	H2 MFC set to  0.000000
3/30/2011	11:30:33 AM	BCl3 MFC set to  0.000000
3/30/2011	11:30:33 AM	PHl3 MFC set to  0.000000
3/30/2011	11:30:33 AM	SiCl4 MFC set to  0.000000
3/30/2011	11:30:33 AM	Bypass solenoid MFC set to  0.000000
3/30/2011	11:30:33 AM	Tube furnace set to 0
3/30/2011	11:31:53 AM	Helium valve closed
3/30/2011	11:31:53 AM	H2 valve closed
3/30/2011	11:31:53 AM	BCl3 valve closed
3/30/2011	11:31:53 AM	PH3 valve closed
3/30/2011	11:31:53 AM	SiCl4 pre valve closed
3/30/2011	11:31:53 AM	SiCl4 post valve closed
3/30/2011	11:31:53 AM	Main Vac valve closed
3/30/2011	11:31:53 AM	Bypass valve closed
3/30/2011	11:31:53 AM	Bubbler valve closed
3/30/2011	11:31:53 AM	Helium MFC set to  0.000000
3/30/2011	11:31:53 AM	H2 MFC set to  0.000000
3/30/2011	11:31:53 AM	BCl3 MFC set to  0.000000
3/30/2011	11:31:53 AM	PHl3 MFC set to  0.000000
3/30/2011	11:31:53 AM	SiCl4 MFC set to  0.000000
3/30/2011	11:31:53 AM	Bypass solenoid MFC set to  0.000000
3/30/2011	11:31:53 AM	Tube furnace set to 0
3/30/2011	11:31:54 AM	Run finished at 11:31 AM
3/30/2011	11:31:54 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/30/2011	11:33:44 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/30/2011	11:33:45 AM	Recipe started at 11:33 AM
3/30/2011	11:33:45 AM	Helium valve closed
3/30/2011	11:33:45 AM	H2 valve closed
3/30/2011	11:33:45 AM	BCl3 valve closed
3/30/2011	11:33:45 AM	PH3 valve closed
3/30/2011	11:33:45 AM	SiCl4 pre valve closed
3/30/2011	11:33:45 AM	SiCl4 post valve closed
3/30/2011	11:33:45 AM	Main Vac valve closed
3/30/2011	11:33:45 AM	Bubbler valve closed
3/30/2011	11:33:45 AM	Bypass valve opened
3/30/2011	11:33:45 AM	Helium MFC set to  0.000000
3/30/2011	11:33:45 AM	H2 MFC set to  0.000000
3/30/2011	11:33:45 AM	BCl3 MFC set to  0.000000
3/30/2011	11:33:45 AM	PHl3 MFC set to  0.000000
3/30/2011	11:33:45 AM	SiCl4 MFC set to  0.000000
3/30/2011	11:33:45 AM	Bypass solenoid MFC set to  0.000000
3/30/2011	11:33:45 AM	Tube furnace set to 0
3/30/2011	11:34:16 AM	Helium valve closed
3/30/2011	11:34:16 AM	H2 valve closed
3/30/2011	11:34:16 AM	BCl3 valve closed
3/30/2011	11:34:16 AM	PH3 valve closed
3/30/2011	11:34:16 AM	SiCl4 pre valve closed
3/30/2011	11:34:16 AM	SiCl4 post valve closed
3/30/2011	11:34:16 AM	Bubbler valve closed
3/30/2011	11:34:16 AM	Main Vac valve opened
3/30/2011	11:34:16 AM	Bypass valve opened
3/30/2011	11:34:16 AM	Helium MFC set to  0.000000
3/30/2011	11:34:16 AM	H2 MFC set to  0.000000
3/30/2011	11:34:16 AM	BCl3 MFC set to  0.000000
3/30/2011	11:34:16 AM	PHl3 MFC set to  0.000000
3/30/2011	11:34:16 AM	SiCl4 MFC set to  0.000000
3/30/2011	11:34:16 AM	Bypass solenoid MFC set to  0.000000
3/30/2011	11:34:17 AM	Tube furnace set to 0
3/30/2011	11:34:17 AM	Run finished at 11:34 AM
3/30/2011	11:34:17 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/30/2011	11:34:26 AM	Helium MFC set to  20.000000
3/30/2011	11:34:33 AM	Helium valve opened
3/30/2011	11:34:41 AM	Helium valve closed
3/30/2011	11:34:45 AM	Helium MFC set to  100.000000
3/30/2011	11:34:46 AM	Helium valve opened
3/30/2011	11:34:50 AM	Helium valve closed
3/30/2011	11:34:55 AM	Helium MFC set to  20.000000
3/30/2011	11:34:55 AM	Helium valve opened
3/30/2011	11:58:27 AM	Helium valve closed
3/30/2011	11:59:10 AM	Helium valve opened
3/30/2011	1:24:38 PM	Helium valve closed
3/30/2011	1:25:28 PM	Recipe started at 1:25 PM
3/30/2011	1:25:28 PM	Helium valve closed
3/30/2011	1:25:29 PM	BCl3 valve closed
3/30/2011	1:25:29 PM	PH3 valve closed
3/30/2011	1:25:29 PM	SiCl4 pre valve closed
3/30/2011	1:25:29 PM	SiCl4 post valve closed
3/30/2011	1:25:29 PM	Main Vac valve closed
3/30/2011	1:25:29 PM	Bypass valve closed
3/30/2011	1:25:29 PM	Bubbler valve closed
3/30/2011	1:25:29 PM	H2 valve opened
3/30/2011	1:25:29 PM	Helium MFC set to  0.000000
3/30/2011	1:25:29 PM	H2 MFC set to  500.000000
3/30/2011	1:25:29 PM	BCl3 MFC set to  0.000000
3/30/2011	1:25:29 PM	PHl3 MFC set to  0.000000
3/30/2011	1:25:29 PM	SiCl4 MFC set to  0.000000
3/30/2011	1:25:29 PM	Bypass solenoid MFC set to  0.000000
3/30/2011	1:25:29 PM	Tube furnace set to 0
3/30/2011	1:26:51 PM	Helium valve closed
3/30/2011	1:26:51 PM	BCl3 valve closed
3/30/2011	1:26:51 PM	PH3 valve closed
3/30/2011	1:26:51 PM	SiCl4 pre valve closed
3/30/2011	1:26:51 PM	SiCl4 post valve closed
3/30/2011	1:26:51 PM	Main Vac valve closed
3/30/2011	1:26:51 PM	Bypass valve closed
3/30/2011	1:26:51 PM	H2 valve opened
3/30/2011	1:26:51 PM	Bubbler valve opened
3/30/2011	1:26:51 PM	Helium MFC set to  0.000000
3/30/2011	1:26:51 PM	H2 MFC set to  500.000000
3/30/2011	1:26:51 PM	BCl3 MFC set to  0.000000
3/30/2011	1:26:51 PM	PHl3 MFC set to  0.000000
3/30/2011	1:26:51 PM	SiCl4 MFC set to  0.000000
3/30/2011	1:26:51 PM	Bypass solenoid MFC set to  0.000000
3/30/2011	1:26:52 PM	Tube furnace set to 1000
3/30/2011	1:46:52 PM	Helium valve closed
3/30/2011	1:46:52 PM	BCl3 valve closed
3/30/2011	1:46:52 PM	PH3 valve closed
3/30/2011	1:46:52 PM	Main Vac valve closed
3/30/2011	1:46:52 PM	Bypass valve closed
3/30/2011	1:46:52 PM	H2 valve opened
3/30/2011	1:46:52 PM	SiCl4 pre valve opened
3/30/2011	1:46:52 PM	SiCl4 post valve opened
3/30/2011	1:46:52 PM	Bubbler valve opened
3/30/2011	1:46:52 PM	Helium MFC set to  0.000000
3/30/2011	1:46:52 PM	H2 MFC set to  500.000000
3/30/2011	1:46:52 PM	BCl3 MFC set to  0.000000
3/30/2011	1:46:52 PM	PHl3 MFC set to  0.000000
3/30/2011	1:46:52 PM	SiCl4 MFC set to  50.000000
3/30/2011	1:46:52 PM	Bypass solenoid MFC set to  0.000000
3/30/2011	1:46:52 PM	Tube furnace set to 1000
3/30/2011	2:16:52 PM	Helium valve closed
3/30/2011	2:16:52 PM	BCl3 valve closed
3/30/2011	2:16:52 PM	PH3 valve closed
3/30/2011	2:16:52 PM	SiCl4 pre valve closed
3/30/2011	2:16:52 PM	SiCl4 post valve closed
3/30/2011	2:16:52 PM	Main Vac valve closed
3/30/2011	2:16:52 PM	Bypass valve closed
3/30/2011	2:16:52 PM	H2 valve opened
3/30/2011	2:16:52 PM	Bubbler valve opened
3/30/2011	2:16:52 PM	Helium MFC set to  0.000000
3/30/2011	2:16:52 PM	H2 MFC set to  500.000000
3/30/2011	2:16:52 PM	BCl3 MFC set to  0.000000
3/30/2011	2:16:52 PM	PHl3 MFC set to  0.000000
3/30/2011	2:16:52 PM	SiCl4 MFC set to  0.000000
3/30/2011	2:16:52 PM	Bypass solenoid MFC set to  0.000000
3/30/2011	2:16:52 PM	Tube furnace set to 0
3/30/2011	2:21:52 PM	H2 valve closed
3/30/2011	2:21:52 PM	BCl3 valve closed
3/30/2011	2:21:52 PM	PH3 valve closed
3/30/2011	2:21:52 PM	SiCl4 pre valve closed
3/30/2011	2:21:52 PM	SiCl4 post valve closed
3/30/2011	2:21:52 PM	Main Vac valve closed
3/30/2011	2:21:52 PM	Bypass valve closed
3/30/2011	2:21:52 PM	Helium valve opened
3/30/2011	2:21:52 PM	Bubbler valve opened
3/30/2011	2:21:52 PM	Helium MFC set to  500.000000
3/30/2011	2:21:52 PM	H2 MFC set to  0.000000
3/30/2011	2:21:52 PM	BCl3 MFC set to  0.000000
3/30/2011	2:21:52 PM	PHl3 MFC set to  0.000000
3/30/2011	2:21:52 PM	SiCl4 MFC set to  0.000000
3/30/2011	2:21:52 PM	Bypass solenoid MFC set to  0.000000
3/30/2011	2:21:52 PM	Tube furnace set to 0
3/30/2011	2:45:56 PM	Helium valve closed
3/30/2011	2:45:56 PM	H2 valve closed
3/30/2011	2:45:56 PM	BCl3 valve closed
3/30/2011	2:45:56 PM	PH3 valve closed
3/30/2011	2:45:56 PM	SiCl4 pre valve closed
3/30/2011	2:45:56 PM	SiCl4 post valve closed
3/30/2011	2:45:56 PM	Main Vac valve closed
3/30/2011	2:45:56 PM	Bypass valve closed
3/30/2011	2:45:56 PM	Bubbler valve closed
3/30/2011	2:45:56 PM	Helium MFC set to  0.000000
3/30/2011	2:45:56 PM	H2 MFC set to  0.000000
3/30/2011	2:45:56 PM	BCl3 MFC set to  0.000000
3/30/2011	2:45:56 PM	PHl3 MFC set to  0.000000
3/30/2011	2:45:56 PM	SiCl4 MFC set to  0.000000
3/30/2011	2:45:56 PM	Bypass solenoid MFC set to  0.000000
3/30/2011	2:45:56 PM	Tube furnace set to 0
3/30/2011	2:45:56 PM	Run finished at 2:45 PM
3/30/2011	2:50:03 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/30/2011	2:50:04 PM	Recipe started at 2:50 PM
3/30/2011	2:50:04 PM	Helium valve closed
3/30/2011	2:50:04 PM	H2 valve closed
3/30/2011	2:50:04 PM	BCl3 valve closed
3/30/2011	2:50:04 PM	PH3 valve closed
3/30/2011	2:50:04 PM	SiCl4 pre valve closed
3/30/2011	2:50:04 PM	SiCl4 post valve closed
3/30/2011	2:50:04 PM	Main Vac valve closed
3/30/2011	2:50:04 PM	Bubbler valve closed
3/30/2011	2:50:04 PM	Bypass valve opened
3/30/2011	2:50:04 PM	Helium MFC set to  0.000000
3/30/2011	2:50:04 PM	H2 MFC set to  0.000000
3/30/2011	2:50:04 PM	BCl3 MFC set to  0.000000
3/30/2011	2:50:04 PM	PHl3 MFC set to  0.000000
3/30/2011	2:50:04 PM	SiCl4 MFC set to  0.000000
3/30/2011	2:50:04 PM	Bypass solenoid MFC set to  0.000000
3/30/2011	2:50:04 PM	Tube furnace set to 0
3/30/2011	2:50:36 PM	Helium valve closed
3/30/2011	2:50:36 PM	H2 valve closed
3/30/2011	2:50:36 PM	BCl3 valve closed
3/30/2011	2:50:36 PM	PH3 valve closed
3/30/2011	2:50:36 PM	SiCl4 pre valve closed
3/30/2011	2:50:36 PM	SiCl4 post valve closed
3/30/2011	2:50:36 PM	Bubbler valve closed
3/30/2011	2:50:36 PM	Main Vac valve opened
3/30/2011	2:50:36 PM	Bypass valve opened
3/30/2011	2:50:36 PM	Helium MFC set to  0.000000
3/30/2011	2:50:36 PM	H2 MFC set to  0.000000
3/30/2011	2:50:36 PM	BCl3 MFC set to  0.000000
3/30/2011	2:50:36 PM	PHl3 MFC set to  0.000000
3/30/2011	2:50:36 PM	SiCl4 MFC set to  0.000000
3/30/2011	2:50:36 PM	Bypass solenoid MFC set to  0.000000
3/30/2011	2:50:36 PM	Tube furnace set to 0
3/30/2011	2:50:37 PM	Run finished at 2:50 PM
3/30/2011	2:50:37 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/30/2011	3:18:14 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/30/2011	3:18:15 PM	Recipe started at 3:18 PM
3/30/2011	3:18:15 PM	H2 valve closed
3/30/2011	3:18:15 PM	BCl3 valve closed
3/30/2011	3:18:15 PM	PH3 valve closed
3/30/2011	3:18:15 PM	SiCl4 pre valve closed
3/30/2011	3:18:15 PM	SiCl4 post valve closed
3/30/2011	3:18:15 PM	Main Vac valve closed
3/30/2011	3:18:15 PM	Bypass valve closed
3/30/2011	3:18:15 PM	Bubbler valve closed
3/30/2011	3:18:15 PM	Helium valve opened
3/30/2011	3:18:15 PM	Helium MFC set to  500.000000
3/30/2011	3:18:15 PM	H2 MFC set to  0.000000
3/30/2011	3:18:15 PM	BCl3 MFC set to  0.000000
3/30/2011	3:18:15 PM	PHl3 MFC set to  0.000000
3/30/2011	3:18:15 PM	SiCl4 MFC set to  0.000000
3/30/2011	3:18:15 PM	Bypass solenoid MFC set to  0.000000
3/30/2011	3:18:15 PM	Tube furnace set to 0
3/30/2011	3:19:34 PM	Helium valve closed
3/30/2011	3:19:34 PM	H2 valve closed
3/30/2011	3:19:34 PM	BCl3 valve closed
3/30/2011	3:19:34 PM	PH3 valve closed
3/30/2011	3:19:34 PM	SiCl4 pre valve closed
3/30/2011	3:19:34 PM	SiCl4 post valve closed
3/30/2011	3:19:34 PM	Main Vac valve closed
3/30/2011	3:19:34 PM	Bypass valve closed
3/30/2011	3:19:34 PM	Bubbler valve closed
3/30/2011	3:19:34 PM	Helium MFC set to  0.000000
3/30/2011	3:19:34 PM	H2 MFC set to  0.000000
3/30/2011	3:19:34 PM	BCl3 MFC set to  0.000000
3/30/2011	3:19:34 PM	PHl3 MFC set to  0.000000
3/30/2011	3:19:34 PM	SiCl4 MFC set to  0.000000
3/30/2011	3:19:34 PM	Bypass solenoid MFC set to  0.000000
3/30/2011	3:19:34 PM	Tube furnace set to 0
3/30/2011	3:19:34 PM	Run finished at 3:19 PM
3/30/2011	3:19:34 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/30/2011	3:21:35 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/30/2011	3:21:36 PM	Recipe started at 3:21 PM
3/30/2011	3:21:36 PM	Helium valve closed
3/30/2011	3:21:36 PM	H2 valve closed
3/30/2011	3:21:36 PM	BCl3 valve closed
3/30/2011	3:21:36 PM	PH3 valve closed
3/30/2011	3:21:36 PM	SiCl4 pre valve closed
3/30/2011	3:21:36 PM	SiCl4 post valve closed
3/30/2011	3:21:36 PM	Main Vac valve closed
3/30/2011	3:21:36 PM	Bubbler valve closed
3/30/2011	3:21:36 PM	Bypass valve opened
3/30/2011	3:21:36 PM	Helium MFC set to  0.000000
3/30/2011	3:21:36 PM	H2 MFC set to  0.000000
3/30/2011	3:21:36 PM	BCl3 MFC set to  0.000000
3/30/2011	3:21:36 PM	PHl3 MFC set to  0.000000
3/30/2011	3:21:36 PM	SiCl4 MFC set to  0.000000
3/30/2011	3:21:36 PM	Bypass solenoid MFC set to  0.000000
3/30/2011	3:21:36 PM	Tube furnace set to 0
3/30/2011	3:22:07 PM	Helium valve closed
3/30/2011	3:22:07 PM	H2 valve closed
3/30/2011	3:22:07 PM	BCl3 valve closed
3/30/2011	3:22:07 PM	PH3 valve closed
3/30/2011	3:22:07 PM	SiCl4 pre valve closed
3/30/2011	3:22:07 PM	SiCl4 post valve closed
3/30/2011	3:22:07 PM	Bubbler valve closed
3/30/2011	3:22:07 PM	Main Vac valve opened
3/30/2011	3:22:07 PM	Bypass valve opened
3/30/2011	3:22:07 PM	Helium MFC set to  0.000000
3/30/2011	3:22:07 PM	H2 MFC set to  0.000000
3/30/2011	3:22:07 PM	BCl3 MFC set to  0.000000
3/30/2011	3:22:07 PM	PHl3 MFC set to  0.000000
3/30/2011	3:22:07 PM	SiCl4 MFC set to  0.000000
3/30/2011	3:22:07 PM	Bypass solenoid MFC set to  0.000000
3/30/2011	3:22:07 PM	Tube furnace set to 0
3/30/2011	3:22:07 PM	Run finished at 3:22 PM
3/30/2011	3:22:07 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/30/2011	3:22:29 PM	Helium MFC set to  20.000000
3/30/2011	3:22:29 PM	Helium valve opened
3/30/2011	3:50:52 PM	Helium valve closed
3/30/2011	3:54:39 PM	Recipe started at 3:54 PM
3/30/2011	3:54:39 PM	Helium valve closed
3/30/2011	3:54:39 PM	BCl3 valve closed
3/30/2011	3:54:39 PM	PH3 valve closed
3/30/2011	3:54:39 PM	SiCl4 pre valve closed
3/30/2011	3:54:39 PM	SiCl4 post valve closed
3/30/2011	3:54:39 PM	Main Vac valve closed
3/30/2011	3:54:39 PM	Bypass valve closed
3/30/2011	3:54:39 PM	Bubbler valve closed
3/30/2011	3:54:39 PM	H2 valve opened
3/30/2011	3:54:39 PM	Helium MFC set to  0.000000
3/30/2011	3:54:39 PM	H2 MFC set to  500.000000
3/30/2011	3:54:39 PM	BCl3 MFC set to  0.000000
3/30/2011	3:54:39 PM	PHl3 MFC set to  0.000000
3/30/2011	3:54:39 PM	SiCl4 MFC set to  0.000000
3/30/2011	3:54:39 PM	Bypass solenoid MFC set to  0.000000
3/30/2011	3:54:39 PM	Tube furnace set to 0
3/30/2011	3:56:02 PM	Helium valve closed
3/30/2011	3:56:02 PM	BCl3 valve closed
3/30/2011	3:56:02 PM	PH3 valve closed
3/30/2011	3:56:02 PM	SiCl4 pre valve closed
3/30/2011	3:56:02 PM	SiCl4 post valve closed
3/30/2011	3:56:02 PM	Main Vac valve closed
3/30/2011	3:56:02 PM	Bypass valve closed
3/30/2011	3:56:02 PM	H2 valve opened
3/30/2011	3:56:02 PM	Bubbler valve opened
3/30/2011	3:56:02 PM	Helium MFC set to  0.000000
3/30/2011	3:56:02 PM	H2 MFC set to  500.000000
3/30/2011	3:56:02 PM	BCl3 MFC set to  0.000000
3/30/2011	3:56:02 PM	PHl3 MFC set to  0.000000
3/30/2011	3:56:02 PM	SiCl4 MFC set to  0.000000
3/30/2011	3:56:02 PM	Bypass solenoid MFC set to  0.000000
3/30/2011	3:56:02 PM	Tube furnace set to 1000
3/30/2011	4:16:02 PM	Helium valve closed
3/30/2011	4:16:02 PM	BCl3 valve closed
3/30/2011	4:16:02 PM	PH3 valve closed
3/30/2011	4:16:02 PM	Main Vac valve closed
3/30/2011	4:16:02 PM	Bypass valve closed
3/30/2011	4:16:02 PM	H2 valve opened
3/30/2011	4:16:02 PM	SiCl4 pre valve opened
3/30/2011	4:16:02 PM	SiCl4 post valve opened
3/30/2011	4:16:02 PM	Bubbler valve opened
3/30/2011	4:16:02 PM	Helium MFC set to  0.000000
3/30/2011	4:16:02 PM	H2 MFC set to  500.000000
3/30/2011	4:16:02 PM	BCl3 MFC set to  0.000000
3/30/2011	4:16:02 PM	PHl3 MFC set to  0.000000
3/30/2011	4:16:02 PM	SiCl4 MFC set to  40.000000
3/30/2011	4:16:02 PM	Bypass solenoid MFC set to  0.000000
3/30/2011	4:16:02 PM	Tube furnace set to 1000
3/30/2011	4:36:02 PM	Helium valve closed
3/30/2011	4:36:02 PM	BCl3 valve closed
3/30/2011	4:36:02 PM	PH3 valve closed
3/30/2011	4:36:02 PM	SiCl4 pre valve closed
3/30/2011	4:36:02 PM	SiCl4 post valve closed
3/30/2011	4:36:02 PM	Main Vac valve closed
3/30/2011	4:36:02 PM	Bypass valve closed
3/30/2011	4:36:02 PM	H2 valve opened
3/30/2011	4:36:02 PM	Bubbler valve opened
3/30/2011	4:36:02 PM	Helium MFC set to  0.000000
3/30/2011	4:36:02 PM	H2 MFC set to  500.000000
3/30/2011	4:36:02 PM	BCl3 MFC set to  0.000000
3/30/2011	4:36:02 PM	PHl3 MFC set to  0.000000
3/30/2011	4:36:02 PM	SiCl4 MFC set to  0.000000
3/30/2011	4:36:02 PM	Bypass solenoid MFC set to  0.000000
3/30/2011	4:36:02 PM	Tube furnace set to 0
3/30/2011	4:41:02 PM	H2 valve closed
3/30/2011	4:41:02 PM	BCl3 valve closed
3/30/2011	4:41:02 PM	PH3 valve closed
3/30/2011	4:41:02 PM	SiCl4 pre valve closed
3/30/2011	4:41:02 PM	SiCl4 post valve closed
3/30/2011	4:41:02 PM	Main Vac valve closed
3/30/2011	4:41:02 PM	Bypass valve closed
3/30/2011	4:41:02 PM	Helium valve opened
3/30/2011	4:41:02 PM	Bubbler valve opened
3/30/2011	4:41:02 PM	Helium MFC set to  500.000000
3/30/2011	4:41:02 PM	H2 MFC set to  0.000000
3/30/2011	4:41:02 PM	BCl3 MFC set to  0.000000
3/30/2011	4:41:02 PM	PHl3 MFC set to  0.000000
3/30/2011	4:41:02 PM	SiCl4 MFC set to  0.000000
3/30/2011	4:41:02 PM	Bypass solenoid MFC set to  0.000000
3/30/2011	4:41:02 PM	Tube furnace set to 0
3/30/2011	5:02:13 PM	Helium valve closed
3/30/2011	5:02:13 PM	H2 valve closed
3/30/2011	5:02:13 PM	BCl3 valve closed
3/30/2011	5:02:13 PM	PH3 valve closed
3/30/2011	5:02:13 PM	SiCl4 pre valve closed
3/30/2011	5:02:13 PM	SiCl4 post valve closed
3/30/2011	5:02:13 PM	Main Vac valve closed
3/30/2011	5:02:13 PM	Bypass valve closed
3/30/2011	5:02:13 PM	Bubbler valve closed
3/30/2011	5:02:13 PM	Helium MFC set to  0.000000
3/30/2011	5:02:13 PM	H2 MFC set to  0.000000
3/30/2011	5:02:13 PM	BCl3 MFC set to  0.000000
3/30/2011	5:02:13 PM	PHl3 MFC set to  0.000000
3/30/2011	5:02:13 PM	SiCl4 MFC set to  0.000000
3/30/2011	5:02:14 PM	Bypass solenoid MFC set to  0.000000
3/30/2011	5:02:14 PM	Tube furnace set to 0
3/30/2011	5:02:14 PM	Run finished at 5:02 PM
3/30/2011	5:04:09 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/30/2011	5:04:10 PM	Recipe started at 5:04 PM
3/30/2011	5:04:10 PM	Helium valve closed
3/30/2011	5:04:10 PM	H2 valve closed
3/30/2011	5:04:10 PM	BCl3 valve closed
3/30/2011	5:04:10 PM	PH3 valve closed
3/30/2011	5:04:10 PM	SiCl4 pre valve closed
3/30/2011	5:04:10 PM	SiCl4 post valve closed
3/30/2011	5:04:10 PM	Main Vac valve closed
3/30/2011	5:04:10 PM	Bubbler valve closed
3/30/2011	5:04:10 PM	Bypass valve opened
3/30/2011	5:04:10 PM	Helium MFC set to  0.000000
3/30/2011	5:04:10 PM	H2 MFC set to  0.000000
3/30/2011	5:04:10 PM	BCl3 MFC set to  0.000000
3/30/2011	5:04:10 PM	PHl3 MFC set to  0.000000
3/30/2011	5:04:10 PM	SiCl4 MFC set to  0.000000
3/30/2011	5:04:10 PM	Bypass solenoid MFC set to  0.000000
3/30/2011	5:04:10 PM	Tube furnace set to 0
3/30/2011	5:04:41 PM	Helium valve closed
3/30/2011	5:04:41 PM	H2 valve closed
3/30/2011	5:04:41 PM	BCl3 valve closed
3/30/2011	5:04:41 PM	PH3 valve closed
3/30/2011	5:04:41 PM	SiCl4 pre valve closed
3/30/2011	5:04:41 PM	SiCl4 post valve closed
3/30/2011	5:04:41 PM	Bubbler valve closed
3/30/2011	5:04:41 PM	Main Vac valve opened
3/30/2011	5:04:41 PM	Bypass valve opened
3/30/2011	5:04:41 PM	Helium MFC set to  0.000000
3/30/2011	5:04:41 PM	H2 MFC set to  0.000000
3/30/2011	5:04:42 PM	BCl3 MFC set to  0.000000
3/30/2011	5:04:42 PM	PHl3 MFC set to  0.000000
3/30/2011	5:04:42 PM	SiCl4 MFC set to  0.000000
3/30/2011	5:04:42 PM	Bypass solenoid MFC set to  0.000000
3/30/2011	5:04:42 PM	Tube furnace set to 0
3/30/2011	5:04:42 PM	Run finished at 5:04 PM
3/30/2011	5:04:42 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/30/2011	6:34:55 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/30/2011	6:34:56 PM	Recipe started at 6:34 PM
3/30/2011	6:34:56 PM	H2 valve closed
3/30/2011	6:34:56 PM	BCl3 valve closed
3/30/2011	6:34:56 PM	PH3 valve closed
3/30/2011	6:34:56 PM	SiCl4 pre valve closed
3/30/2011	6:34:56 PM	SiCl4 post valve closed
3/30/2011	6:34:56 PM	Main Vac valve closed
3/30/2011	6:34:56 PM	Bypass valve closed
3/30/2011	6:34:56 PM	Bubbler valve closed
3/30/2011	6:34:56 PM	Helium valve opened
3/30/2011	6:34:56 PM	Helium MFC set to  500.000000
3/30/2011	6:34:56 PM	H2 MFC set to  0.000000
3/30/2011	6:34:56 PM	BCl3 MFC set to  0.000000
3/30/2011	6:34:56 PM	PHl3 MFC set to  0.000000
3/30/2011	6:34:56 PM	SiCl4 MFC set to  0.000000
3/30/2011	6:34:56 PM	Bypass solenoid MFC set to  0.000000
3/30/2011	6:34:56 PM	Tube furnace set to 0
3/30/2011	6:36:16 PM	Helium valve closed
3/30/2011	6:36:16 PM	H2 valve closed
3/30/2011	6:36:16 PM	BCl3 valve closed
3/30/2011	6:36:16 PM	PH3 valve closed
3/30/2011	6:36:16 PM	SiCl4 pre valve closed
3/30/2011	6:36:16 PM	SiCl4 post valve closed
3/30/2011	6:36:16 PM	Main Vac valve closed
3/30/2011	6:36:16 PM	Bypass valve closed
3/30/2011	6:36:16 PM	Bubbler valve closed
3/30/2011	6:36:16 PM	Helium MFC set to  0.000000
3/30/2011	6:36:16 PM	H2 MFC set to  0.000000
3/30/2011	6:36:16 PM	BCl3 MFC set to  0.000000
3/30/2011	6:36:16 PM	PHl3 MFC set to  0.000000
3/30/2011	6:36:16 PM	SiCl4 MFC set to  0.000000
3/30/2011	6:36:16 PM	Bypass solenoid MFC set to  0.000000
3/30/2011	6:36:16 PM	Tube furnace set to 0
3/30/2011	6:36:16 PM	Run finished at 6:36 PM
3/30/2011	6:36:16 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/30/2011	6:39:44 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/30/2011	6:39:45 PM	Recipe started at 6:39 PM
3/30/2011	6:39:45 PM	Helium valve closed
3/30/2011	6:39:45 PM	H2 valve closed
3/30/2011	6:39:45 PM	BCl3 valve closed
3/30/2011	6:39:45 PM	PH3 valve closed
3/30/2011	6:39:45 PM	SiCl4 pre valve closed
3/30/2011	6:39:45 PM	SiCl4 post valve closed
3/30/2011	6:39:45 PM	Main Vac valve closed
3/30/2011	6:39:45 PM	Bubbler valve closed
3/30/2011	6:39:45 PM	Bypass valve opened
3/30/2011	6:39:45 PM	Helium MFC set to  0.000000
3/30/2011	6:39:45 PM	H2 MFC set to  0.000000
3/30/2011	6:39:45 PM	BCl3 MFC set to  0.000000
3/30/2011	6:39:45 PM	PHl3 MFC set to  0.000000
3/30/2011	6:39:45 PM	SiCl4 MFC set to  0.000000
3/30/2011	6:39:45 PM	Bypass solenoid MFC set to  0.000000
3/30/2011	6:39:45 PM	Tube furnace set to 0
3/30/2011	6:40:16 PM	Helium valve closed
3/30/2011	6:40:16 PM	H2 valve closed
3/30/2011	6:40:16 PM	BCl3 valve closed
3/30/2011	6:40:16 PM	PH3 valve closed
3/30/2011	6:40:16 PM	SiCl4 pre valve closed
3/30/2011	6:40:16 PM	SiCl4 post valve closed
3/30/2011	6:40:16 PM	Bubbler valve closed
3/30/2011	6:40:16 PM	Main Vac valve opened
3/30/2011	6:40:16 PM	Bypass valve opened
3/30/2011	6:40:16 PM	Helium MFC set to  0.000000
3/30/2011	6:40:16 PM	H2 MFC set to  0.000000
3/30/2011	6:40:16 PM	BCl3 MFC set to  0.000000
3/30/2011	6:40:16 PM	PHl3 MFC set to  0.000000
3/30/2011	6:40:16 PM	SiCl4 MFC set to  0.000000
3/30/2011	6:40:16 PM	Bypass solenoid MFC set to  0.000000
3/30/2011	6:40:16 PM	Tube furnace set to 0
3/30/2011	6:40:17 PM	Run finished at 6:40 PM
3/30/2011	6:40:17 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/30/2011	6:45:33 PM	Helium MFC set to  50.000000
3/30/2011	6:45:33 PM	Helium valve opened
3/30/2011	7:23:57 PM	Helium valve closed
3/30/2011	7:25:00 PM	Recipe started at 7:24 PM
3/30/2011	7:25:00 PM	Helium valve closed
3/30/2011	7:25:00 PM	BCl3 valve closed
3/30/2011	7:25:00 PM	PH3 valve closed
3/30/2011	7:25:00 PM	SiCl4 pre valve closed
3/30/2011	7:25:00 PM	SiCl4 post valve closed
3/30/2011	7:25:00 PM	Main Vac valve closed
3/30/2011	7:25:00 PM	Bypass valve closed
3/30/2011	7:25:00 PM	Bubbler valve closed
3/30/2011	7:25:00 PM	H2 valve opened
3/30/2011	7:25:00 PM	Helium MFC set to  0.000000
3/30/2011	7:25:00 PM	H2 MFC set to  500.000000
3/30/2011	7:25:00 PM	BCl3 MFC set to  0.000000
3/30/2011	7:25:00 PM	PHl3 MFC set to  0.000000
3/30/2011	7:25:00 PM	SiCl4 MFC set to  0.000000
3/30/2011	7:25:00 PM	Bypass solenoid MFC set to  0.000000
3/30/2011	7:25:00 PM	Tube furnace set to 0
3/30/2011	7:26:22 PM	Helium valve closed
3/30/2011	7:26:22 PM	BCl3 valve closed
3/30/2011	7:26:22 PM	PH3 valve closed
3/30/2011	7:26:22 PM	SiCl4 pre valve closed
3/30/2011	7:26:22 PM	SiCl4 post valve closed
3/30/2011	7:26:22 PM	Main Vac valve closed
3/30/2011	7:26:22 PM	Bypass valve closed
3/30/2011	7:26:22 PM	H2 valve opened
3/30/2011	7:26:22 PM	Bubbler valve opened
3/30/2011	7:26:22 PM	Helium MFC set to  0.000000
3/30/2011	7:26:22 PM	H2 MFC set to  500.000000
3/30/2011	7:26:22 PM	BCl3 MFC set to  0.000000
3/30/2011	7:26:22 PM	PHl3 MFC set to  0.000000
3/30/2011	7:26:22 PM	SiCl4 MFC set to  0.000000
3/30/2011	7:26:22 PM	Bypass solenoid MFC set to  0.000000
3/30/2011	7:26:23 PM	Tube furnace set to 1000
3/30/2011	7:46:23 PM	Helium valve closed
3/30/2011	7:46:23 PM	BCl3 valve closed
3/30/2011	7:46:23 PM	PH3 valve closed
3/30/2011	7:46:23 PM	Main Vac valve closed
3/30/2011	7:46:23 PM	Bypass valve closed
3/30/2011	7:46:23 PM	H2 valve opened
3/30/2011	7:46:23 PM	SiCl4 pre valve opened
3/30/2011	7:46:23 PM	SiCl4 post valve opened
3/30/2011	7:46:23 PM	Bubbler valve opened
3/30/2011	7:46:23 PM	Helium MFC set to  0.000000
3/30/2011	7:46:23 PM	H2 MFC set to  500.000000
3/30/2011	7:46:23 PM	BCl3 MFC set to  0.000000
3/30/2011	7:46:23 PM	PHl3 MFC set to  0.000000
3/30/2011	7:46:23 PM	SiCl4 MFC set to  25.000000
3/30/2011	7:46:23 PM	Bypass solenoid MFC set to  0.000000
3/30/2011	7:46:23 PM	Tube furnace set to 1000
3/30/2011	8:06:23 PM	Helium valve closed
3/30/2011	8:06:23 PM	BCl3 valve closed
3/30/2011	8:06:23 PM	PH3 valve closed
3/30/2011	8:06:23 PM	SiCl4 pre valve closed
3/30/2011	8:06:23 PM	SiCl4 post valve closed
3/30/2011	8:06:23 PM	Main Vac valve closed
3/30/2011	8:06:23 PM	Bypass valve closed
3/30/2011	8:06:23 PM	H2 valve opened
3/30/2011	8:06:23 PM	Bubbler valve opened
3/30/2011	8:06:23 PM	Helium MFC set to  0.000000
3/30/2011	8:06:23 PM	H2 MFC set to  500.000000
3/30/2011	8:06:23 PM	BCl3 MFC set to  0.000000
3/30/2011	8:06:23 PM	PHl3 MFC set to  0.000000
3/30/2011	8:06:23 PM	SiCl4 MFC set to  0.000000
3/30/2011	8:06:23 PM	Bypass solenoid MFC set to  0.000000
3/30/2011	8:06:23 PM	Tube furnace set to 0
3/30/2011	8:11:23 PM	H2 valve closed
3/30/2011	8:11:23 PM	BCl3 valve closed
3/30/2011	8:11:23 PM	PH3 valve closed
3/30/2011	8:11:23 PM	SiCl4 pre valve closed
3/30/2011	8:11:23 PM	SiCl4 post valve closed
3/30/2011	8:11:23 PM	Main Vac valve closed
3/30/2011	8:11:23 PM	Bypass valve closed
3/30/2011	8:11:23 PM	Helium valve opened
3/30/2011	8:11:23 PM	Bubbler valve opened
3/30/2011	8:11:23 PM	Helium MFC set to  500.000000
3/30/2011	8:11:23 PM	H2 MFC set to  0.000000
3/30/2011	8:11:23 PM	BCl3 MFC set to  0.000000
3/30/2011	8:11:23 PM	PHl3 MFC set to  0.000000
3/30/2011	8:11:23 PM	SiCl4 MFC set to  0.000000
3/30/2011	8:11:23 PM	Bypass solenoid MFC set to  0.000000
3/30/2011	8:11:23 PM	Tube furnace set to 0
3/30/2011	8:44:43 PM	Helium valve closed
3/30/2011	8:44:43 PM	H2 valve closed
3/30/2011	8:44:43 PM	BCl3 valve closed
3/30/2011	8:44:43 PM	PH3 valve closed
3/30/2011	8:44:43 PM	SiCl4 pre valve closed
3/30/2011	8:44:43 PM	SiCl4 post valve closed
3/30/2011	8:44:43 PM	Main Vac valve closed
3/30/2011	8:44:43 PM	Bypass valve closed
3/30/2011	8:44:43 PM	Bubbler valve closed
3/30/2011	8:44:43 PM	Helium MFC set to  0.000000
3/30/2011	8:44:43 PM	H2 MFC set to  0.000000
3/30/2011	8:44:43 PM	BCl3 MFC set to  0.000000
3/30/2011	8:44:43 PM	PHl3 MFC set to  0.000000
3/30/2011	8:44:43 PM	SiCl4 MFC set to  0.000000
3/30/2011	8:44:43 PM	Bypass solenoid MFC set to  0.000000
3/30/2011	8:44:43 PM	Tube furnace set to 0
3/30/2011	8:44:43 PM	Run finished at 8:44 PM
3/30/2011	9:19:45 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/30/2011	9:19:46 PM	Recipe started at 9:19 PM
3/30/2011	9:19:46 PM	H2 valve closed
3/30/2011	9:19:46 PM	BCl3 valve closed
3/30/2011	9:19:46 PM	PH3 valve closed
3/30/2011	9:19:46 PM	SiCl4 pre valve closed
3/30/2011	9:19:46 PM	SiCl4 post valve closed
3/30/2011	9:19:46 PM	Main Vac valve closed
3/30/2011	9:19:46 PM	Bypass valve closed
3/30/2011	9:19:46 PM	Bubbler valve closed
3/30/2011	9:19:46 PM	Helium valve opened
3/30/2011	9:19:46 PM	Helium MFC set to  500.000000
3/30/2011	9:19:46 PM	H2 MFC set to  0.000000
3/30/2011	9:19:46 PM	BCl3 MFC set to  0.000000
3/30/2011	9:19:46 PM	PHl3 MFC set to  0.000000
3/30/2011	9:19:46 PM	SiCl4 MFC set to  0.000000
3/30/2011	9:19:46 PM	Bypass solenoid MFC set to  0.000000
3/30/2011	9:19:46 PM	Tube furnace set to 0
3/30/2011	9:19:47 PM	Helium valve closed
3/30/2011	9:19:47 PM	H2 valve closed
3/30/2011	9:19:47 PM	BCl3 valve closed
3/30/2011	9:19:47 PM	PH3 valve closed
3/30/2011	9:19:47 PM	SiCl4 pre valve closed
3/30/2011	9:19:47 PM	SiCl4 post valve closed
3/30/2011	9:19:47 PM	Main Vac valve closed
3/30/2011	9:19:47 PM	Bypass valve closed
3/30/2011	9:19:47 PM	Bubbler valve closed
3/30/2011	9:19:47 PM	Helium MFC set to  0.000000
3/30/2011	9:19:47 PM	H2 MFC set to  0.000000
3/30/2011	9:19:47 PM	BCl3 MFC set to  0.000000
3/30/2011	9:19:47 PM	PHl3 MFC set to  0.000000
3/30/2011	9:19:47 PM	SiCl4 MFC set to  0.000000
3/30/2011	9:19:47 PM	Bypass solenoid MFC set to  0.000000
3/30/2011	9:19:47 PM	Tube furnace set to 0
3/30/2011	9:19:48 PM	Run finished at 9:19 PM
3/30/2011	9:19:48 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/30/2011	9:22:41 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/30/2011	9:22:41 PM	Recipe started at 9:22 PM
3/30/2011	9:22:42 PM	Helium valve closed
3/30/2011	9:22:42 PM	H2 valve closed
3/30/2011	9:22:42 PM	BCl3 valve closed
3/30/2011	9:22:42 PM	PH3 valve closed
3/30/2011	9:22:42 PM	SiCl4 pre valve closed
3/30/2011	9:22:42 PM	SiCl4 post valve closed
3/30/2011	9:22:42 PM	Main Vac valve closed
3/30/2011	9:22:42 PM	Bubbler valve closed
3/30/2011	9:22:42 PM	Bypass valve opened
3/30/2011	9:22:42 PM	Helium MFC set to  0.000000
3/30/2011	9:22:42 PM	H2 MFC set to  0.000000
3/30/2011	9:22:42 PM	BCl3 MFC set to  0.000000
3/30/2011	9:22:42 PM	PHl3 MFC set to  0.000000
3/30/2011	9:22:42 PM	SiCl4 MFC set to  0.000000
3/30/2011	9:22:42 PM	Bypass solenoid MFC set to  0.000000
3/30/2011	9:22:42 PM	Tube furnace set to 0
3/30/2011	9:23:13 PM	Helium valve closed
3/30/2011	9:23:13 PM	H2 valve closed
3/30/2011	9:23:13 PM	BCl3 valve closed
3/30/2011	9:23:13 PM	PH3 valve closed
3/30/2011	9:23:13 PM	SiCl4 pre valve closed
3/30/2011	9:23:13 PM	SiCl4 post valve closed
3/30/2011	9:23:13 PM	Bubbler valve closed
3/30/2011	9:23:13 PM	Main Vac valve opened
3/30/2011	9:23:13 PM	Bypass valve opened
3/30/2011	9:23:13 PM	Helium MFC set to  0.000000
3/30/2011	9:23:13 PM	H2 MFC set to  0.000000
3/30/2011	9:23:13 PM	BCl3 MFC set to  0.000000
3/30/2011	9:23:13 PM	PHl3 MFC set to  0.000000
3/30/2011	9:23:13 PM	SiCl4 MFC set to  0.000000
3/30/2011	9:23:13 PM	Bypass solenoid MFC set to  0.000000
3/30/2011	9:23:13 PM	Tube furnace set to 0
3/30/2011	9:23:13 PM	Run finished at 9:23 PM
3/30/2011	9:23:13 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
